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Impact of Thermal Treatments in Crystalline Reconstruction and Electrical Properties of Diamond Ohmic Contacts Created by Boron Ion Implantation
Author(s) -
Piñero José C.,
Villar María P.,
Araujo Daniel,
Montserrat Josep,
Antúnez Bernat,
Godig Philippe
Publication year - 2017
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201700230
Subject(s) - diamond , ohmic contact , ion implantation , materials science , boron , thermal treatment , annealing (glass) , dopant , diamond cubic , doping , material properties of diamond , analytical chemistry (journal) , ion , synthetic diamond , lattice (music) , spectroscopy , nanotechnology , optoelectronics , chemistry , metallurgy , composite material , physics , organic chemistry , layer (electronics) , chromatography , quantum mechanics , acoustics
To obtain p‐type doping of diamond through B ion implantation, thermal treatments are necessary to reconstruct the diamond lattice and to locate B atoms in substitutional lattice positions. The present contribution evaluates by STEM‐EELS and CL spectroscopy the amorphisation of diamond lattice under the B + bombardment and its subsequent reconstruction after the thermal treatment. In addition, TEM observations allowed localizing the boron spatial distribution. Carbon‐related peaks of EELS spectroscopy shows a nearly complete recovery of the diamond lattice after thermal treatment. Indeed, at 1600 °C, sp 2 /sp 3 ratio in implanted regions changes from 0.56 to 0.18 (0.15 value was measured before implantation). On the other hand, CL spectroscopy reveals how A‐Band and free exciton emission peaks, which are quenched by B + implantation, recover after annealing. Boron ion implantation was used to create ohmic contacts in two different diamond samples, treated with different annealing velocities. Crystalline reconstruction, evidenced by TEM data explains the related electric behaviour. Nanoscale evidences of amorphisation, lattice reconstruction and dopant activation are presented and discussed in this work.