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Self‐Assembly Semipolar AlN Nanopyramids Grown on Powder‐Compressed AlN Substrates
Author(s) -
Lee MingJui,
Lin WeiTing,
Huang ChunPin,
Chen ShengHui,
Lai KunYu
Publication year - 2017
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201700127
Subject(s) - materials science , metalorganic vapour phase epitaxy , chemical vapor deposition , crystallinity , crystallite , optoelectronics , annealing (glass) , buffer (optical fiber) , substrate (aquarium) , ultraviolet , nitride , sputtering , nanotechnology , layer (electronics) , chemical engineering , epitaxy , composite material , metallurgy , thin film , telecommunications , oceanography , geology , computer science , engineering
AlN nanopyramids with semipolar facets are grown by metal‐organic chemical vapor deposition (MOCVD) on the AlN substrate attained with compressed AlN powders. Surface qualities of the polycrystalline substrate are improved with an AlN buffer layer deposited by sputtering, followed by appropriate post annealing. It is found that a pulsed flow condition of ammonia (NH 3 ) during the MOCVD growth can effectively enhance morphologic uniformity and crystallinity of the nanopyramids. The semipolar AlN nanopyramids serve as a promising template for ultraviolet emitters, considering their increased surface area and reduced polarization fields.