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On the use of Fe(dpm) 3 as precursor for the thermal‐CVD growth of hematite nanostructures
Author(s) -
Gasparotto Alberto,
Carraro Giorgio,
Maccato Chiara,
Barreca Davide
Publication year - 2017
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201600779
Subject(s) - hematite , chemical vapor deposition , nanostructure , materials science , chemical engineering , reactivity (psychology) , phase (matter) , nanotechnology , chemistry , metallurgy , organic chemistry , medicine , alternative medicine , pathology , engineering
The iron(III) β‐diketonate Fe(dpm) 3 (dpm = 2,2,6,6‐tetramethyl‐3,5‐heptanedionate) is investigated as precursor for the thermally‐assisted chemical vapor deposition (CVD) of hematite (α‐Fe 2 O 3 ) nanostructures. To this aim, the compound gas‐phase reactivity is first elucidated by in‐situ infrared spectroscopy both under N 2 and N 2 + O 2 atmospheres. Subsequently, Fe(dpm) 3 is tested in CVD experiments on various substrates, as a function of the growth temperature, to evaluate the precursor applicability in the preparation of diversified hematite ‐based materials, potentially addressing various technological end‐uses. In this study, relevant results concerning the gas‐phase behavior of Fe(dpm) 3 and the compositional, structural, morphological, and optical properties of the resulting α‐Fe 2 O 3 deposits are presented and critically discussed.