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Low‐frequency energy harvesters made from double‐layer PZT thick films on titanium plate
Author(s) -
Wang Chu,
Cao Ziping,
Luo Jun,
Zhang Jinya,
Yuan Ming
Publication year - 2017
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201600444
Subject(s) - materials science , bimorph , lead zirconate titanate , composite material , piezoelectricity , substrate (aquarium) , layer (electronics) , titanium , vibration , acoustics , ferroelectricity , optoelectronics , metallurgy , oceanography , physics , dielectric , geology
A miniature piezoelectric energy harvester with bimorph configuration and low natural frequency is proposed in this article for vibration harvesting. The vibration energy harvester is fabricated from double‐layer lead zirconate titanate (PZT) thick films and titanium (Ti) substrate via a dip‐coating process. The high fracture toughness and strength of the Ti substrate were found to be conducive to forming a harvester with low nature frequency. Highly (100) oriented PZT films 1.71 µm in thickness were deposited on both sides of 50 µm‐thick Ti substrate to fabricate the harvester. When the harvester was tested under 3 m s −2 vibration acceleration and an optimum load resistor of 47.5 kΩ, the measured resonant frequency was only 24.2 Hz, and the optimal output power was reached 50.9 µW.