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Thermal conductivity of nanocrystalline diamond films grown by hot filament chemical vapor deposition
Author(s) -
Mohr Markus,
Brühne Kai,
Fecht HansJörg
Publication year - 2016
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201600171
Subject(s) - chemical vapor deposition , diamond , materials science , nanocrystalline material , thermal conductivity , grain boundary , grain size , carbon film , deposition (geology) , composite material , conductivity , material properties of diamond , thin film , nanotechnology , microstructure , chemistry , paleontology , sediment , biology
Nanocrystalline diamond films were grown by hot filament chemical vapor deposition. The thermal conductivity of the films was measured using the 3ω‐method. Nanocrystalline diamond films grown under the presented growth conditions are rather homogeneous in film properties within the entire film thickness and deposited area. The considerably smaller thermal conductivities, compared to single crystal diamond can be explained by an influence of the grain boundaries with varying grain sizes. We use a theoretical approach to describe the thermal conductivity of nanocrystalline materials to characterize the grain boundaries thermal boundary conductivity also with respect to the growth conditions.