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Homoepitaxial diamond film growth: High purity, high crystalline quality, isotopic enrichment, and single color center formation
Author(s) -
Teraji Tokuyuki,
Yamamoto Takashi,
Watanabe Kenji,
Koide Yasuo,
Isoya Junichi,
Onoda Shinobu,
Ohshima Takeshi,
Rogers Lachlan J.,
Jelezko Fedor,
Neumann Philipp,
Wrachtrup Jörg,
Koizumi Satoshi
Publication year - 2015
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201532449
Subject(s) - diamond , chemical vapor deposition , materials science , impurity , vacancy defect , doping , synthetic diamond , carbon fibers , silicon , material properties of diamond , nanotechnology , analytical chemistry (journal) , optoelectronics , chemistry , crystallography , metallurgy , composite material , organic chemistry , composite number
With optical/electronic devices of the next generation in mind, we provide a guideline for the growth of homoepitaxial diamond films that possess higher crystalline quality, higher chemical purity, and a higher carbon isotopic ratio. A custom‐built microwave plasma‐assisted chemical vapor deposition system was constructed to achieve these requirements. To improve both the purity and crystalline quality of homoepitaxial diamond films, an advanced growth condition was applied: higher oxygen concentration in the growth ambient. Under this growth condition for high‐quality diamond, a thick diamond film of ≥30 μm was deposited reproducibly while maintaining high purity and a flat surface. Then, combining this advanced growth condition for non‐doped diamond with a unique doping technique that provides parts‐per‐billion order doping, single‐color centers of either nitrogen‐vacancy or silicon‐vacancy centers that show excellent properties were formed. The new idea of using these color centers as a probe for detecting tiny amounts of impurities was presented. These advanced growth and characterization techniques are expected to open up new fields of diamond research that require extremely low‐impurity concentration, for use in power devices and quantum information devices.