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Enhanced interference using microcavity structure for accurate thin film thickness measurement
Author(s) -
Feng Yuanxiang,
Chen Shuming
Publication year - 2015
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201532319
Subject(s) - interference (communication) , thin film , materials science , reflectivity , optics , spectral line , optoelectronics , nanotechnology , computer science , physics , telecommunications , channel (broadcasting) , astronomy
A new method based on microcavity structure is developed for accurately measuring the thickness of organic thin films. By sandwiching the thin films between a bottom reflective mirror and a top semi‐reflective mirror, the interference effect is greatly enhanced. As a result, the reflectance spectra exhibit distinctive, strong, and sharp interference peaks. The interference pattern is very sensitive to the thickness of the thin films. By fitting the interference pattern with the calculated reflectance spectra, the thickness of the thin films can be accurately determined.