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Simulations, fabrication, and characterization of diamond‐coated Love wave‐type surface acoustic wave sensors
Author(s) -
Talbi A.,
Soltani A.,
Rumeau A.,
Taylor A.,
Drbohlavová L.,
Klimša L,
Kopeček J.,
Fekete L.,
Krečmarová M.,
Mortet V.
Publication year - 2015
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201532188
Subject(s) - quartz crystal microbalance , surface acoustic wave , biosensor , materials science , diamond , acoustic wave , quartz , fabrication , love wave , characterization (materials science) , nanotechnology , optoelectronics , detector , acoustics , optics , chemistry , wave propagation , mechanical wave , composite material , physics , adsorption , pathology , medicine , longitudinal wave , alternative medicine , organic chemistry
Diamond is an attractive material for biosensing applications due its chemical stability and biocompatibility and the recent development of various covalent attachment schemes for biomolecules. Acoustic sensors are highly sensitive with the capability to detect minute mass variation by monitoring changes in their electro‐mechanical resonance frequency. Quartz crystal microbalance (QCM) sensors are the simplest that can operate in liquids but in comparison, Love wave sensors are more sensitive acoustic detectors in comparison. In this work, we present both theoretical and experimental study of Love wave‐type surface acoustic wave (SAW) devices on AT quartz crystals substrates coated with diamond at low temperature for biosensing applications.