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Photonic crystals in lithium niobate by combining focussed ion beam writing and ion‐beam enhanced etching
Author(s) -
Geiss Reinhard,
Diziain Séverine,
Steinert Michael,
Schrempel Frank,
Kley ErnstBernhard,
Tünnermann Andreas,
Pertsch Thomas
Publication year - 2014
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201431328
Subject(s) - lithium niobate , materials science , ion beam , photonic crystal , optoelectronics , ion , resonator , polarization (electrochemistry) , focused ion beam , optics , etching (microfabrication) , beam (structure) , photonics , realization (probability) , nanotechnology , chemistry , physics , organic chemistry , layer (electronics) , statistics , mathematics
The realization of photonic crystals in self‐suspended lithium niobate membranes by means of focussed ion beam writing and ion‐beam enhanced etching is presented. The influence of gallium contamination is discussed and considered in the realization of a L3 photonic crystal resonator that is showing the designed linear optical response in a cross‐polarization resonant scattering experiment.