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F‐ and Cl‐terminations of (100)‐oriented single crystalline diamond
Author(s) -
Widmann C. J.,
Giese C.,
Wolfer M.,
Kono S.,
Nebel C. E.
Publication year - 2014
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201431188
Subject(s) - fluorine , diamond , chlorine , monolayer , x ray photoelectron spectroscopy , plasma , inductively coupled plasma , materials science , chemistry , inorganic chemistry , analytical chemistry (journal) , chemical engineering , nanotechnology , metallurgy , organic chemistry , physics , quantum mechanics , engineering
The surface termination of single crystalline diamond with fluorine and chlorine was investigated. The diamond was exposed to SF 6 inductively coupled plasma for fluorination and to Cl 2 plasma for chlorination. For the fluorine termination, the plasma treatment caused one monolayer of fluorine (measured with two angle photoelectron detection) and no carbonyl fluorides on the diamond surface. Furthermore no graphitization or roughening of the surface was observed. The plasma treatment with chlorine led to rough surfaces.