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Fabrication of ion‐sliced lithium niobate slabs using helium ion implantation and Cu–Sn bonding
Author(s) -
Xiang BingXi,
Guan Jing,
Jiao Yang,
Wang Lei
Publication year - 2014
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201431138
Subject(s) - lithium niobate , materials science , fabrication , annealing (glass) , ion , ion implantation , diffusion bonding , rutherford backscattering spectrometry , optoelectronics , thin film , nanotechnology , composite material , chemistry , medicine , alternative medicine , organic chemistry , pathology
The fabrication of LiNbO 3 waveguide slabs with sub‐micron thickness is presented using He ion‐induced splitting and the Cu–Sn bonding technique. The exfoliation time of implanted LiNbO 3 was investigated as a function of annealing temperatures to reveal the activation energies during the splitting process. Defect‐free waveguide films with large areas of several cm 2 are consistently produced by using the inter‐diffusion bonding of Cu–Sn interface. The fabricated film was investigated by using the Rutherford backscattering/channeling method and dark mode spectroscopy.