Premium
Thermal conductivity measurements of thin films at high temperature modulated photothermal radiometry at LNE
Author(s) -
Fleurence Nolwenn,
Hay Bruno,
Davée Guillaume,
Cappella Andréa,
Foulon Emilie
Publication year - 2015
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201400084
Subject(s) - materials science , radiometry , thin film , metrology , micrometer , thermal conductivity , photothermal therapy , chalcogenide , nanometre , optics , optoelectronics , characterization (materials science) , nanotechnology , composite material , physics
A new metrological facility devoted to the thermal conductivity measurements up to 1000 °C for thin films (from few tens nanometers to few micrometers thick) deposited on substrate has been recently designed at LNE. Its measurement principle is based on the infrared modulated photothermal radiometry technique (MPTR). This device has been applied to the thermal characterization of industrially relevant chalcogenide thin films (Ge 2 Sb 2 Ti 5 ) up to 400 °C. This work, performed in the frame of the European joint research project “Thin Films,” seeks to improve the traceability to the International System of Units (SI) as well as the reliability of this type of measurements at sub‐micrometer scale.