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CVD precursors for transition metal oxide nanostructures: molecular properties, surface behavior and temperature effects
Author(s) -
Tabacchi Gloria,
Fois Ettore,
Barreca Davide,
Gasparotto Alberto
Publication year - 2014
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201330085
Subject(s) - oxide , chemical vapor deposition , transition metal , nanomaterials , metal , materials science , atmospheric temperature range , nanostructure , chemical engineering , chemical physics , chemistry , nanotechnology , catalysis , organic chemistry , metallurgy , thermodynamics , physics , engineering
Integrated analyses on a series of β‐diketonate‐diamine transition metal complexes (M = Fe, Co, Cu, Zn) highlight the metal center influence on molecular physico‐chemical properties and provide understanding of the favorable behavior of these compounds as precursors in the chemical vapor deposition (CVD) growth of metal/metal oxide nanomaterials. The Zn complex, which shows the most symmetric coordination environment in the gas phase, is activated in contact with the heated CVD growth surface model. First‐principles simulations evidenced surface‐induced rolling motion of the Zn precursor in the 363–750 K range, suggesting the relevance of vibrationally excited molecular rolling as activation pathway in high temperature surface chemistry. Molecular properties (left) and hot‐surface behavior (right) of the Zn(hfa) 2 TMEDA CVD precursor.