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Structural investigation of nanoporous alumina film with grazing incidence small angle X‐ray scattering
Author(s) -
Buttard D.,
Schülli T.,
Lazzari R.
Publication year - 2013
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201330024
Subject(s) - nanoporous , materials science , wafer , scattering , anodizing , grazing incidence small angle scattering , small angle x ray scattering , silicon , synchrotron , x ray , optics , aluminium , hexagonal crystal system , thin film , composite material , optoelectronics , crystallography , nanotechnology , chemistry , small angle neutron scattering , physics , neutron scattering
Nanoporous alumina films (NPAF) have been elaborated by anodization of an aluminum film on silicon wafer. Ex situ structural characterization of the films has been achieved with grazing incidence small angle X‐ray scattering under ultra high vacuum atmosphere and using a synchrotron source. The comparison of the experimental patterns with suitable modeling confirms the cylindrical geometry of the pores well as the good local hexagonal order.