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Non‐periodic nanoscale templates by diffraction mask projection laser ablation
Author(s) -
Mäder Marisa,
Höche Thomas,
Rauschenbach Bernd
Publication year - 2012
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201228363
Subject(s) - materials science , optics , laser ablation , lithography , diffraction , nanodot , fabrication , substrate (aquarium) , etching (microfabrication) , nanostructure , sapphire , laser , optoelectronics , template , nanotechnology , layer (electronics) , physics , medicine , oceanography , alternative medicine , pathology , geology
A route toward a top‐down fabrication of non‐periodically arranged substrate‐bound metal nanostructure arrays using mask projection laser ablation is presented. In the first step phase masks featuring non‐periodic patterns are fabricated by laser lithography and subsequent ion‐beam etching. It is shown that the geometry of the diffraction mask projection laser ablation (DiMPLA) setup plays a crucial role for the ability to transfer non‐periodic phase mask structures into arrangement of nanodots. The latter nanostructures, in the present case derived from an ultrathin Au film on a sapphire substrate, consist non‐periodically arranged gold nanodots. These dots are exemplarily used as templates for the growth of sculptured thin films (STFs) by glancing‐angle deposition (GLAD).Light‐optical micrograph of square pattern diffraction mask with smaller and larger periodicities, respectively.