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Investigation of optical, structural, and chemical properties of indium sulfide thin films evaporated at low temperature by modulated flux deposition
Author(s) -
Sanz C.,
Guillén C.,
Gutiérrez M. T.,
Herrero J.
Publication year - 2013
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201228259
Subject(s) - indium , amorphous solid , thin film , materials science , sulfide , substrate (aquarium) , crystallite , flux (metallurgy) , deposition (geology) , analytical chemistry (journal) , sulfur , optoelectronics , chemistry , metallurgy , nanotechnology , crystallography , paleontology , oceanography , chromatography , sediment , geology , biology
Indium sulfide thin films were successfully deposited on soda lime glass substrates by modulated flux deposition (MFD) at significantly lower substrate temperatures than in previous experiments. The influence of both experimental parameters sulfur source temperature ( T S ) and substrate temperature ( T ) on the optical, structural, and chemical properties were studied. Amorphous indium sulfide layers were obtained at T = 100 °C and crystallized as β‐In 2 S 3 for T ≥ 150 °C. Quite high values were required for the T S parameter in order to ensure the formation of transparent β‐In 2 S 3 thin films. No other polycrystalline phases were detected. Direct optical bandgaps of 2.58 eV (amorphous In 2 S 3 ) and 2.73 eV (β‐In 2 S 3 ) were estimated for film thicknesses of around 100 nm.