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Multi‐sensor chip for the investigation of different types of metal oxides for the detection of H 2 O 2 in the ppm range
Author(s) -
Reisert Steffen,
Schneider Benno,
Geissler Hanno,
van Gompel Matthias,
Wagner Patrick,
Schöning Michael J.
Publication year - 2013
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201200930
Subject(s) - materials science , hydrogen peroxide , scanning electron microscope , metal , doping , oxide , analytical chemistry (journal) , fabrication , hydrogen , nanotechnology , chemistry , optoelectronics , metallurgy , organic chemistry , composite material , medicine , alternative medicine , pathology
In this work, a multi‐sensor chip for the investigation of the sensing properties of different types of metal oxides towards hydrogen peroxide in the ppm range is presented. The fabrication process and physical characterization of the multi‐sensor chip are described. Pure SnO 2 and WO 3 as well as Pd‐ and Pt‐doped SnO 2 films are characterized in terms of their sensitivity to H 2 O 2 . The sensing films have been prepared by drop‐coating of water‐dispensed nano‐powders. A physical characterization, including scanning electron microscopy and X‐ray diffraction analysis of the deposited metal‐oxide films, was done. From the measurements in hydrogen peroxide atmosphere, it could be shown, that all of the tested metal oxide films are suitable for the detection of H 2 O 2 in the ppm range. The highest sensitivity and reproducibility was achieved using Pt‐doped SnO 2 . Calibration plot of a SnO 2 , WO 3 , Pt‐, and Pd‐doped SnO 2 gas sensor for H 2 O 2 concentrations in the ppm range.