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Silicon/silicide grown out of nanoporous gold nanoparticles
Author(s) -
Wang Dong,
Schaaf Peter
Publication year - 2013
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201200896
Subject(s) - dewetting , nanoporous , materials science , silicide , substrate (aquarium) , nanoparticle , nanotechnology , alloy , colloidal gold , chemical engineering , silicon , layer (electronics) , metallurgy , thin film , oceanography , geology , engineering
Ordered arrays of nanoporous gold nanoparticles were fabricated via a combination of solid‐state dewetting of Au/Ag bilayers on pre‐patterned SiO 2 /Si substrates and a subsequent dealloying process. AuAg alloy nanoparticles were formed after dewetting, and a subsequent dealloying process leads to the formation of nanoporous gold nanoparticles. The dewetting was carried at 700, 800, and 900 °C, respectively. The growth of Si or silicide particles occurred after dewetting at 800 and 900 °C, and these particles remains even after the dealloying process. This growth is supposed to occur via a solid–liquid–solid (SLS) mechanism, and mainly Ag serves as catalyst. A 20 nm thick thermal SiO 2 is sufficient to avoid this reaction between the Au/Ag bilayers and the Si substrate when the dewetting temperature is 700 °C.