Premium
GISAXS study of Si nanostructures in SiO 2 matrix for solar cell applications
Author(s) -
Pivac Branko,
Dubček Pavo,
Capan Ivana,
Zorc Hrvoje,
Dasović Jasna,
Bernstorff Sigrid,
Wu Marvin,
Vlahovic Branislav
Publication year - 2013
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201200527
Subject(s) - grazing incidence small angle scattering , materials science , nanoparticle , scattering , annealing (glass) , nanostructure , solar cell , photoluminescence , synchrotron , nanotechnology , optoelectronics , optics , composite material , inelastic scattering , physics , x ray raman scattering
We explore the process of Si nanoparticles formation in SiO 2 matrix suitable for advanced solar cells application. To this purpose a superstructure consisting of alternating 5 nm thick SiO x and SiO 2 layers was deposited by high vacuum evaporation from solid sources. After high temperature annealing of such structures in high vacuum, the SiO x decomposed and Si nanoparticles aggregated at their former position forming therefore a superstructure of Si nanoparticles embedded in dielectric SiO 2 matrix. To explore such process of nanoobjects formation in different matrix, grazing incidence small‐angle X‐ray scattering (GISAXS) seems to be as relatively easy non‐destructive technique; a logical choice. Despite the fact that due to the rather small difference in electron density between Si and SiO 2 . GISAXS contrast is very small, by performing GISAXS with intense synchrotron light and subtracting the dominant surface contribution to the overall signal we managed to retrieve information on the structural changes within the layers. The conclusions from the GISAXS analysis were confirmed by photoluminescence measurements.