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Back Cover: Fabrication of ordered silicon nanopillars and nanowires by self‐assembly and metal‐assisted etching (Phys. Status Solidi A 6/2011)
Author(s) -
Boarino Luca,
Imbraguglio Dario,
Enrico Emanuele,
De Leo Natascia,
Celegato Federica,
Tiberto Paola,
Pugno Nicola,
Amato Giampiero
Publication year - 2011
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201190019
Subject(s) - nanopillar , materials science , etching (microfabrication) , nanowire , silicon , nanotechnology , sputtering , metal , reactive ion etching , fabrication , optoelectronics , layer (electronics) , thin film , nanostructure , metallurgy , alternative medicine , medicine , pathology
As shown by Boarino et al. ( pp. 1412–1416 ), an array of silicon nanowires can be obtained by the self‐assembly of polystyrene nanospheres and metal assisted etching. A thin film of noble metal like silver or gold is nano‐indented by sputter etching of Ar+ ions through the interstitial voids among the hexagonal close‐packed assembly of the spheres. During the successive metal assisted etching, the thin metal film sinks into the bulk of silicon extruding ordered silicon nanowires.