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Piezoelectric MEMS generator based on the bulk PZT/silicon wafer bonding technique
Author(s) -
Tang Gang,
Liu Jingquan,
Liu Hesheng,
Li Yigui,
Yang Chunsheng,
He Dang,
DzungDao Viet,
Tanaka Katsuhiko,
Sugiyama Susumu
Publication year - 2011
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201127186
Subject(s) - materials science , lapping , piezoelectricity , microelectromechanical systems , wafer , ceramic , cantilever , fabrication , nanogenerator , composite material , polishing , epoxy , silicon , pmut , optoelectronics , medicine , alternative medicine , pathology
A MEMS‐based piezoelectric energy harvester was fabricated by bonding a piezoelectric ceramic Pb (Zr,Ti)O 3 (PZT) plate to silicon wafer. The generator structure of a trapezoidal shape composite cantilever beam with nickel metal mass was designed. The novel fabrication techniques to obtain PZT thick film with excellent piezoelectric properties, including a low‐temperature PZT—Si bonding using epoxy resin as the intermediate adhesive layer and thinning of the bulk PZT ceramics by mechanical lapping and polishing method, were carried out. A piezoelectric MEMS power generator array was successfully fabricated and the measurement results for a microgenerator with typical dimension were also presented. The test result shows that this novel technique has great potential to fabricate high‐performance piezoelectric MEMS energy harvester.