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AZO/Au/AZO multilayer as a transparent conductive electrode
Author(s) -
Lee Seungjun,
Bang Seokhwan,
Park Joohyun,
Park Soyeon,
Ko Youngbin,
Jeon Hyeongtag
Publication year - 2012
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201127049
Subject(s) - materials science , transmittance , electrical resistivity and conductivity , layer (electronics) , electrode , doping , deposition (geology) , electrical conductor , thin film , atomic layer deposition , optoelectronics , composite material , nanotechnology , chemistry , paleontology , sediment , electrical engineering , biology , engineering
A multilayer of Al doped ZnO/gold/Al doped ZnO (AZO/Au/AZO) was deposited by atomic layer deposition (ALD), and its structural, electrical, and optical properties were investigated. The thin Au interlayer was deposited by e‐beam evaporator and showed a series of islands. As the Au interlayer thickness increased, the Au islands coalesced resulting in a continuous Au film at 12 nm or thicker. As the Au interlayer thickness increased to 12 nm, the carrier concentration increased from 1.3 × 10 20 to 4.2 × 10 21 cm −3 , the Hall mobility increased from 13.4 to 22.4 cm 2 /Vs, and the resistivity decreased from 2.6 × 10 −3 to 1.2 × 10 −4 Ωcm. However, the transmittance decreased from 80 to 48%. Additionally, the AZO/Au/AZO multilayer was less crystalline than a single AZO layer.