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Inside Back Cover (Phys. Status Solidi A 4/2010)
Author(s) -
Yokoyama Takayuki,
Asoh Hidetaka,
Ono Sachiko
Publication year - 2010
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Reports
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201090008
Subject(s) - etching (microfabrication) , materials science , isotropic etching , polystyrene , substrate (aquarium) , layer (electronics) , electrolyte , sputtering , colloid , reactive ion etching , pillar , chemical engineering , nanotechnology , analytical chemistry (journal) , composite material , thin film , chemistry , electrode , polymer , chromatography , oceanography , geology , engineering , structural engineering
Yokoyama et al. ( p. 943 ) examine the formation of ordered microstructures on an InP substrate by metal‐assisted chemical etching and by anodic etching using colloidal crystals as a mask. The metal‐assisted chemical etching of the InP substrate was carried out in a mixed solution of H 2 SO 4 /H 2 O 2 using a Pt honeycomb pattern as catalyst; by ion sputtering through the mask, InP column arrays with a close‐packed configuration having an ordered periodicity were formed. In the case of anodic etching, with a layer of colloidal crystals consisting of polystyrene spheres as a mask, HCl was used as electrolyte. At the optimum HCl concentration, InP disk arrays or pillar arrays, respectively, were fabricated: see the SEM images on the left of the cover picture (1.5 mol dm‐3 HCl) and the AFM tapping‐mode image and line scan on the right (2 mol dm‐3 HCl).