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Application of the electron probe microanalysis in nitride‐based heterostructures investigation
Author(s) -
Kuznetsova Yana,
Baidakova Marina,
Flegontova Ekaterina,
Kuznetsov Anton,
Sitnikova Alla,
Zamoryanskaya Maria
Publication year - 2011
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201084015
Subject(s) - heterojunction , quantum well , electron microprobe , microanalysis , monte carlo method , nitride , materials science , nanoscopic scale , electron , electron probe microanalysis , optoelectronics , analytical chemistry (journal) , chemistry , nanotechnology , optics , physics , layer (electronics) , metallurgy , mathematics , quantum mechanics , statistics , laser , organic chemistry , chromatography
The aim of this work was development of electron probe microanalysis (EPMA) technique suitable for composition determination of nanoscale layers. Proposed technique allows to determine the content of thin layers lying beneath the surface including single quantum wells (SQWs). The method is based on Monte‐Carlo numerical simulations. Application of this technique to the nitride heterostructures with SQWs and multiple quantum wells (MQWs) was demonstrated. Peculiarities of the method are discussed.Electron trajectories in GaN sample with In 0.1 Ga 0.9 N single quantum well. Simulation was made by Monte‐Carlo method.