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Soft magnetic multilayer films with wide frequency band losses and high resistivity
Author(s) -
Ma Qiang
Publication year - 2011
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201026706
Subject(s) - materials science , electrical resistivity and conductivity , sputter deposition , sputtering , optoelectronics , thin film , condensed matter physics , nanotechnology , electrical engineering , physics , engineering
A series of CoFeB/MgO multilayers was fabricated by means of DC/RF magnetron sputtering. It is observed that the electromagnetic properties of the multilayers of CoFeB/MgO are closely related with the thickness of CoFeB sublayers, and the soft magnetic properties of discontinuous multilayers are affected by the cycle number of CoFeB/MgO bilayers. The optimized film of [Co 64 Fe 24 B 12 (0.7 nm)/MgO(0.4 nm)] 50 exhibits a magnetic loss µ ″ larger than 100 and µ ′ larger than 80 between 0.9 and 2.1 GHz. The electrical resistivity ρ of this film is as high as 3.75 × 10 3 µΩ cm. The results indicate that this discontinuous CoFeB/MgO multilayer film has potential to serve as a noise suppressor or EMC materials in the GHz frequency range.