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Development and optimization of scanning spreading resistance microscopy for measuring the two‐dimensional carrier profile in solar cell structures
Author(s) -
Eyben Pierre,
Seidel Felix,
Hantschel Thomas,
Schulze Andreas,
Lorenz Anne,
De Castro Angel Uruena,
Van Gestel Dries,
John Joachim,
Horzel Joerg,
Vandervorst Wilfried
Publication year - 2011
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201000306
Subject(s) - materials science , dopant , spreading resistance profiling , solar cell , optoelectronics , silicon , secondary ion mass spectrometry , grain boundary , polycrystalline silicon , doping , diffusion , surface finish , surface roughness , analytical chemistry (journal) , nanotechnology , microstructure , ion , composite material , chemistry , thin film transistor , physics , organic chemistry , layer (electronics) , chromatography , thermodynamics
Within this work, we have explored the use of scanning spreading resistance microscopy (SSRM) on advanced solar cell structures. Three main topics, corresponding to three important needs, were targeted. First, we have analyzed the highly doped regions at the frontside of solar cells. The influence of the surface roughness, hindering the use of other techniques ( e.g ., secondary ion mass spectrometry, SIMS), and the phosphorus diffusion along grains for multicrystalline silicon (mc‐Si) have been studied quantitatively as they may affect substantially the electrical properties of solar cells. Secondly, we have explored local backside contacts manufactured using new techniques like laser ablation followed by dopant diffusion. Having a better knowledge of the two‐dimensional (2D)‐dopant distribution is a subject of growing interest. Finally, we have studied electrical properties of grain‐boundary and intragrain defects in polycrystalline silicon (pc‐Si) layers as they may play a major role in the electrical performances of the solar cells.