Premium
LiNbO 3 thin film for A 1 mode of Lamb wave resonators
Author(s) -
Kadota Michio,
Ogami Takashi,
Yamamoto Kansho,
Tochishita Hikari
Publication year - 2011
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201000060
Subject(s) - resonator , materials science , chemical vapor deposition , thin film , polarity (international relations) , optoelectronics , mode (computer interface) , deposition (geology) , optics , chemistry , physics , nanotechnology , paleontology , biochemistry , sediment , biology , computer science , cell , operating system
Currently, a high frequency device more than 3 GHz is required. High frequency resonators with resonant frequencies of 4.5 and 6.3 GHz were fabricated by utilizing an anti‐symmetric first mode (A 1 ) of a Lamb wave having a high velocity consisting of a thin LiNbO 3 film deposited by a chemical vapor deposition (CVD) system. By measuring polarities of their LiNbO 3 films, it was clarified that the thinner film had a large mixture of +c and −c domains, and the occupation ratio of main polarity influenced their frequency characteristics.