LiNbO 3  thin film for A 1  mode of Lamb wave resonators | Zendy

Kadota Michio | Zendy; Ogami Takashi | Zendy; Yamamoto Kansho | Zendy; Tochishita Hikari | Zendy

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LiNbO 3 thin film for A 1 mode of Lamb wave resonators

Author(s) -

Kadota Michio,

Ogami Takashi,

Yamamoto Kansho,

Tochishita Hikari

Publication year - 2011

Publication title -

physica status solidi (a)

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.532

H-Index - 104

eISSN - 1862-6319

pISSN - 1862-6300

DOI - 10.1002/pssa.201000060

Subject(s) - resonator , materials science , chemical vapor deposition , thin film , polarity (international relations) , optoelectronics , mode (computer interface) , deposition (geology) , optics , chemistry , physics , nanotechnology , paleontology , biochemistry , sediment , biology , computer science , cell , operating system

Currently, a high frequency device more than 3 GHz is required. High frequency resonators with resonant frequencies of 4.5 and 6.3 GHz were fabricated by utilizing an anti‐symmetric first mode (A 1 ) of a Lamb wave having a high velocity consisting of a thin LiNbO 3 film deposited by a chemical vapor deposition (CVD) system. By measuring polarities of their LiNbO 3 films, it was clarified that the thinner film had a large mixture of +c and −c domains, and the occupation ratio of main polarity influenced their frequency characteristics.

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