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Formation of {100} facet‐terminated nanocrystalline diamond by microwave plasma chemical vapor deposition: Edge effect
Author(s) -
Tang C. J.,
Fernandes A. J. S.,
Buijnsters J. G.,
Abe I.,
Domingues M. F. F.,
Pinto J. L.
Publication year - 2010
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201000007
Subject(s) - diamond , chemical vapor deposition , materials science , nanocrystalline material , facet (psychology) , substrate (aquarium) , deposition (geology) , plasma , plasma enhanced chemical vapor deposition , microwave , ion source , chemical engineering , composite material , nanotechnology , psychology , social psychology , paleontology , oceanography , physics , personality , quantum mechanics , sediment , geology , biology , big five personality traits , engineering
{100} Facet‐terminated nanocrystalline and {100} textured large‐grained polycrystalline diamond (PCD) have been grown simultaneously not only on different substrates but also on the same substrate from a single deposition run using high‐power microwave plasma chemical vapor deposition (MPCVD). The synthesis of diamond with varying morphologies in the same deposition run was achieved by combining the effect of nitrogen addition on diamond growth and the influence of substrate size and geometry on the distribution of the plasma power density and temperature along the substrate. We have modeled the temperature distribution on the substrates by computer simulations using the finite element method. The formation mechanism of several morphologies including both {100} facet‐terminated nanocrystalline and {100} textured large‐grained PCD on one substrate is discussed based on this temperature analysis and other simulation results described in the literature.