Structural characterization of H plasma‐doped ZnO single crystals by positron annihilation spectroscopies

Nominally undoped, hydrothermally grown ZnO single crystals have been investigated before and after exposure to remote H plasma. Structural characterizations have been made by various positron annihilation spectroscopies (continuous and pulsed slow positron beams, conventional lifetime). The content of bound hydrogen (H‐b) before and after the remote H plasma treatment at the polished side of the crystals was determined at depths of 100 and 600 nm, respectively, using nuclear reaction analysis. At a depth of 100 nm, H‐b increased from (11.8 ± 2.5) to (48.7 ± 7.6) × 10 19  cm −3 after remote H plasma treatment, whereas at 600 nm no change in H‐b was observed.