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A micron‐sized nanoporous multifunction sensing device
Author(s) -
Codinachs L. Moreno i,
Birkenstock C.,
Garma T.,
Zierold R.,
Bachmann J.,
Nielsch K.,
Schöning M. J.,
Morral A. Fontcuberta i
Publication year - 2009
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200880472
Subject(s) - nanoporous , hysteresis , capacitive sensing , atomic layer deposition , materials science , reproducibility , aluminium oxide , oxide , aluminium , deposition (geology) , porosity , nanopore , layer (electronics) , anodic aluminum oxide , anodizing , chemical engineering , voltage , nanotechnology , aluminum oxide , analytical chemistry (journal) , composite material , chemistry , electrical engineering , metallurgy , chromatography , fabrication , alternative medicine , pathology , engineering , biology , paleontology , quantum mechanics , medicine , physics , sediment
In this work, a capacitive sensor based on Anodic Aluminium Oxide (AAO) porous structures has been developed. In some cases, the pores have been also conformally coated with a high chemical pure SiO 2 by means of Atomic Layer Deposition (ALD). Temperature measurements have been done in DI water obtaining a response of 5 nF/°C. pH measurements have been performed and the responses obtained are between 0.2 and 1 nF/pH. The reproducibility of the sensors has been found to be high and a larger hysteresis effect has been observed in the samples with alumina pores rather than in the SiO 2 ones. The hysteresis seems to be related to the charging of the oxide upon application of a voltage. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)