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Transparent diamond‐on‐glass micro‐electrode arrays for ex‐vivo neuronal study
Author(s) -
Bonnauron M.,
Saada S.,
Mer C.,
Gesset C.,
Williams O. A.,
Rousseau L.,
Scorsone E.,
Mailley P.,
Nesladek M.,
Arnault J.C.,
Bergonzo P.
Publication year - 2008
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200879733
Subject(s) - diamond , nanodiamond , materials science , fabrication , electrode , microelectrode , nanotechnology , optical transparency , biocompatibility , silicon , nucleation , optoelectronics , composite material , chemistry , metallurgy , alternative medicine , organic chemistry , pathology , medicine
We report on the fabrication of high aspect ratio diamond Micro Electrode Arrays (MEAs) grown on silicon as well as on glass substrates using an optimised nanoseeding technique and Bias Enhanced Nucleation (BEN). Such MEA systems combine high electrode reactivity and high electrical current injection limits with resiliency, biocompatibility and optical transparency of diamond surfaces. We present the technological steps for the fabrication of 2D as well as 3D diamond microelectrode arrays. The patterning issues involve the use of detonation nanodiamond particles (DND). (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)