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Electrical characterization of locally charged oxidized nanocrystalline diamond films by Kelvin force microscopy
Author(s) -
Cˇermák J.,
Kromka A.,
Rezek B.
Publication year - 2008
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200879712
Subject(s) - kelvin probe force microscope , diamond , volta potential , nanocrystalline material , materials science , micrometer , analytical chemistry (journal) , thin film , nanotechnology , photoconductive atomic force microscopy , atomic force microscopy , chemistry , scanning electron microscope , scanning capacitance microscopy , optics , composite material , scanning confocal electron microscopy , physics , chromatography
A nanocrystalline diamond (NCD) thin film is deposited on a gold electrode and oxygen terminated by r.f. oxygen plasma. An atomic force microscope (AFM) is used to induce electrostatically charged micrometer‐sized areas on the diamond film by applying bias voltages in the range between –30 V and +30 V on the AFM tip during scanning in contact mode. Trapped charge was detected by Kelvin force microscopy showing a contact potential difference of 150 mV for both polarities. Decrease of surface potential by 20 mV in the positively charged area and by 90 mV in the negatively charged area is observed after 15 h under ambient conditions. Possible charge trapping mechanisms are discussed in terms of electret‐like or semiconductor‐like behavior of NCD thin films. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)