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The role of a conductive CaRuO 3 bottom electrode for ferroelectric BaTiO 3 films on a Si substrate
Author(s) -
Paik Hanjong,
Hong Jongin,
Jang Yongoon,
Park Yun Chang,
Lee Jeong Yong,
Song Hanwook,
No Kwangsoo
Publication year - 2009
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200824296
Subject(s) - high resolution transmission electron microscopy , materials science , ferroelectricity , analytical chemistry (journal) , substrate (aquarium) , auger electron spectroscopy , thin film , electrode , x ray photoelectron spectroscopy , sputter deposition , coercivity , optoelectronics , transmission electron microscopy , sputtering , dielectric , nanotechnology , nuclear magnetic resonance , chemistry , condensed matter physics , oceanography , physics , chromatography , geology , nuclear physics
A capacitor of Pt/BaTiO 3 /CaRuO 3 (Pt/BTO/CRO) was successfully prepared on a Si substrate by using radio‐frequency (RF) magnetron sputtering. The preferentially (110)‐oriented CRO bottom electrode enabled us to obtain highly oriented BTO thin film on the Si substrate. Local epitaxy between BTO and CRO was clearly confirmed by high resolution transmission electron microscopy (HRTEM) and fast Fourier transformation (FFT) analysis. The clear interface between CRO and BTO without any Si diffusion and silicate formation was determined by Auger electron spectroscopy (AES). The polarization value (2 P r ) of 6 μC/cm 2 , the coercive field (2| E c |) of 61 kV/cm and the stable current density of 1 × 10 –8 A/cm 2 around 2100 kV/cm electric field were obtained. Its tunability on CRO was reached up to 0.52 with a loss tangent less than 0.09 at room temperature. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)