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Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling
Author(s) -
Hsu ShihHsin,
Liu EnShao,
Chang YiaChung,
Hilfiker James N.,
Kim Young Dong,
Kim Tae Jung,
Lin ChunJung,
Lin GongRu
Publication year - 2008
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200777832
Subject(s) - nanorod , materials science , ellipsometry , stack (abstract data type) , characterization (materials science) , nanostructure , porosity , layer (electronics) , nanotechnology , analytical chemistry (journal) , composite material , thin film , chemistry , organic chemistry , computer science , programming language
Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub‐layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled‐wave analysis and finite‐element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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