Premium
Precise phase‐modulation generalized ellipsometry of anisotropic samples
Author(s) -
Halagacˇka L.,
Postava K.,
Foldyna M.,
Pištora J.
Publication year - 2008
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200777823
Subject(s) - ellipsometry , anisotropy , azimuth , optics , materials science , modulation (music) , phase (matter) , physics , thin film , nanotechnology , acoustics , quantum mechanics
A procedure for the measurement of the generalized ellipsometric angles using a phase‐modulation spectroscopic ellipsometer is described. Generalized phase‐modulation ellipsometry combined with zone averaging enables precise characterization of samples with generalized anisotropy including anisotropic thin films with general axis orientation, liquid crystals, gratings, and anisotropic nanostructures. We employed a UVISEL Jobin Yvon spectroscopic ellipsometer with a photoelastic modulator (PEM). The Jones matrix formalism is applied to nondepolarizing samples and ellipsometer components description. The zone averaging proposed enables elimination of azimuth‐angle error and component imperfection. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)