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Rayleigh–Mie scattering ellipsometry as an in situ diagnostic for the production of “smart nanoparticles”
Author(s) -
Weiß Raphaela,
Hong SukHo,
Ränsch Jens,
Winter Jörg
Publication year - 2008
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200777803
Subject(s) - rayleigh scattering , ellipsometry , nanoparticle , mie scattering , materials science , amorphous solid , analytical chemistry (journal) , scattering , in situ , refractive index , wavelength , radius , optics , light scattering , nanotechnology , chemistry , thin film , optoelectronics , crystallography , chromatography , physics , organic chemistry , computer security , computer science
We have utilised in situ Rayleigh–Mie scattering ellipsometry to analyse the growth process of amorphous hydrogenated carbon nitride (a‐C:H:N) nanoparticles synthesised in a plasma of nitrogen and acetylene. The validity of the measurements is shortly discussed. The complex refractive indices in dependence of the particle radius are carefully determined and compared with a‐C:H(:N) films which are deposited under similar conditions and analysed via multiple wavelength ellipsometry. Internal structures of the nanoparticles are then deduced from the change of optical constants during the growth. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)