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In‐situ spectroscopic ellipsometry: optimization of monitoring and closed‐loop‐control procedures
Author(s) -
Humlíček J.
Publication year - 2008
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200777798
Subject(s) - in situ , ellipsometry , substrate (aquarium) , extraction (chemistry) , series (stratigraphy) , thin film , carbon fibers , diamond , reflectivity , materials science , loop (graph theory) , analytical chemistry (journal) , computer science , optics , nanotechnology , chemistry , composite material , geology , mathematics , chromatography , physics , organic chemistry , combinatorics , paleontology , oceanography , composite number
We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in‐situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond‐like carbon on TiCN/steel substrate. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)