Stiffening and hydrophilisation of SOG low‐ k  material studied by ellipsometric porosimetry, UV ellipsometry and laser‐induced surface acoustic waves | Zendy

Urbanowicz A. M. | Zendy; Meshman B. | Zendy; Schneider D. | Zendy; Baklanov M. R. | Zendy

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Stiffening and hydrophilisation of SOG low‐ k material studied by ellipsometric porosimetry, UV ellipsometry and laser‐induced surface acoustic waves

Author(s) -

Urbanowicz A. M.,

Meshman B.,

Schneider D.,

Baklanov M. R.

Publication year - 2008

Publication title -

physica status solidi (a)

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.532

H-Index - 104

eISSN - 1862-6319

pISSN - 1862-6300

DOI - 10.1002/pssa.200777749

Subject(s) - ellipsometry , porosimetry , materials science , excimer laser , analytical chemistry (journal) , absorption (acoustics) , dielectric , wavelength , laser , refractive index , optics , chemistry , composite material , optoelectronics , thin film , nanotechnology , porosity , chromatography , physics , porous medium

In this paper we evaluate the correlation between UV light absorption of SOG (spin‐on glass) low dielectric constant (low‐ k ) films and chemical changes induced by an excimer UV source at several wavelengths: 172 nm, 222 nm, and 308 nm. Low‐ k absorption in the UV range was measured by nitrogen purged UV ellipsometry. It is shown that im‐ provement of mechanical properties is accompanied by degradation (hydrophilisation) of low‐ k films. Changes in hydrophobic properties were evaluated by water‐source ellipsometric porosimetry (WEP). The Young's moduli of the films were measured by laser‐induced surface acoustic waves (LAwaves). (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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