Premium
n and k testing of magnetic heads with imaging spectroscopic ellipsometry
Author(s) -
Vaupel M.,
Yunfeng Song,
Zhimin Yuan
Publication year - 2008
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200777743
Subject(s) - ellipsometry , materials science , substrate (aquarium) , surface roughness , surface finish , atomic force microscopy , analytical chemistry (journal) , thin film , optics , chemistry , nanotechnology , composite material , physics , oceanography , chromatography , geology
The method of imaging spectroscopic ellipsometry is applied on magnetic read/write heads of hard disks. By means of spectroscopic ellipsometry, an optical model of the TiC/Al 2 O 3 substrate including surface roughness and concentration gradient of TiC in the alumina substrate is generated. Surface roughness is measured with both ellipsometry and atomic force microscopy (AFM). The granular structure of TiC/Al 2 O 3 is investigated in micrographs of n and k . It is discussed how Delta mapping of the magnetic pole area of the head can be used to measure DLC coating thickness and the variation of chemical constitution of the metal substrate. Repeatability of measurements of Delta is optimized in a one µm 2 region of interest (ROI) on a metal stripe of the magnetic pole. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)