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An opto‐mechatronic magnetic field microsensor
Author(s) -
Chang H. C.,
Hwang C. C.,
Lai C. C.,
Tseng C. L.
Publication year - 2007
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200777340
Subject(s) - materials science , magnetic field , fiber bragg grating , microelectromechanical systems , magnet , wavelength , optoelectronics , silicon , nanotechnology , mechanical engineering , engineering , physics , quantum mechanics
Abstract An opto‐mechatronic microsensor based on fiber Bragg grating technology for sensing magnetic field strength is developed and tested. The device is fabricated using low temperature silicon‐based MEMS compatible technologies. A uniform Fe/Ni layer and embedded Fe/Ni flaps are deposited on the elastic membrane respectively that are actuated by external magnetic field for evaluating sensitivity. The Bragg wavelength shift of 0.37 nm was measured at the distance of 0.32 mm between the microsensor and a magnet with flux density of 1.12 T. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)