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Three‐dimensional topography using an X‐ray microbeam and novel slit technique
Author(s) -
Tanuma R.,
Kubo T.,
Togoh F.,
Tawara T.,
Saito A.,
Fukuda K.,
Hayashi K.,
Tsusaka Y.
Publication year - 2007
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200675703
Subject(s) - microbeam , slit , optics , deconvolution , diffraction , resolution (logic) , image resolution , materials science , physics , computer science , artificial intelligence
This paper describes section topography using an X‐ray microbeam and a novel slit having a V‐shaped crevice (V‐slit). The V‐slit is characterized by a sharp‐pointed exponential transmission curve, which enables depth‐resolved imaging with high spatial resolution. An iterative deconvolution for image restoration is effectively executable, providing submicron resolution in cross‐sectional diffraction imaging. The new method is applied to the analysis of screw dislocation in a SiC diode. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)