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Novel microfluidic flow sensor based on a microchannel capped by porous silicon
Author(s) -
Pagonis D. N.,
Petropoulos A.,
Kaltsas G.,
Nassiopoulou A. G.,
Tserepi A.
Publication year - 2007
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200674389
Subject(s) - microchannel , porous silicon , materials science , silicon , microfluidics , electropolishing , fabrication , substrate (aquarium) , layer (electronics) , nanotechnology , porosity , anodizing , mesoporous material , characterization (materials science) , planar , optoelectronics , electrolyte , chemistry , electrode , composite material , computer science , alternative medicine , oceanography , pathology , aluminium , biochemistry , catalysis , medicine , geology , computer graphics (images)
This work concerns the fabrication, modeling and characterization of a novel microfluidic flow sensor based on a microchannel capped with a porous silicon membrane, on top of which the sensor active elements are integrated. The microchannel is formed through a two‐step anodization process. In the first step a mesoporous silicon layer is formed on a lithographically defined area, while in the second step a channel is formed underneath the porous layer by electropolishing. The channel is buried into bulk silicon and capped with a free‐standing porous silicon layer, which is co‐planar with the Si substrate. The overall developed process for the formation of the device will be described and simulation and device characterization results will be presented. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)