An integrated vapor source with a porous silicon wick | Zendy

Wallner J. Z. | Zendy; Kunt K. S. | Zendy; Obanionwu H. | Zendy; Oborny M. C. | Zendy; Bergstrom P. L. | Zendy; Zellers E. T. | Zendy

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An integrated vapor source with a porous silicon wick

Author(s) -

Wallner J. Z.,

Kunt K. S.,

Obanionwu H.,

Oborny M. C.,

Bergstrom P. L.,

Zellers E. T.

Publication year - 2007

Publication title -

physica status solidi (a)

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.532

H-Index - 104

eISSN - 1862-6319

pISSN - 1862-6300

DOI - 10.1002/pssa.200674383

Subject(s) - diffusion , decane , water vapor , porous silicon , silicon , materials science , chemistry , analytical chemistry (journal) , thermodynamics , optoelectronics , chromatography , physics , organic chemistry

A micro vapor source has been developed for calibrating micro gas chromatograph (μGC) systems. By utilizing a porous silicon wick in a micro diffusion system, vapor generation with excellent stability has been achieved. The source has shown uniform and repeatable vapor generation for n‐decane with less than a 0.1% variation in 9 hours, and less than a 0.5% variation in rate over 7 days. The evolution rate follows the diffusion model as expected, although the room temperature rate is higher than theoretically predicted. Equipped with a refillable reservoir, this vapor source is suitable for extended μGC field deployment. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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