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An integrated vapor source with a porous silicon wick
Author(s) -
Wallner J. Z.,
Kunt K. S.,
Obanionwu H.,
Oborny M. C.,
Bergstrom P. L.,
Zellers E. T.
Publication year - 2007
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200674383
Subject(s) - diffusion , decane , water vapor , porous silicon , silicon , materials science , chemistry , analytical chemistry (journal) , thermodynamics , optoelectronics , chromatography , physics , organic chemistry
A micro vapor source has been developed for calibrating micro gas chromatograph (μGC) systems. By utilizing a porous silicon wick in a micro diffusion system, vapor generation with excellent stability has been achieved. The source has shown uniform and repeatable vapor generation for n‐decane with less than a 0.1% variation in 9 hours, and less than a 0.5% variation in rate over 7 days. The evolution rate follows the diffusion model as expected, although the room temperature rate is higher than theoretically predicted. Equipped with a refillable reservoir, this vapor source is suitable for extended μGC field deployment. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)