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Alkaline etching of macroporous silicon
Author(s) -
Lehmann Volker
Publication year - 2007
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200674324
Subject(s) - hillock , etching (microfabrication) , membrane , silicon , porosity , chemical engineering , porous silicon , materials science , reactive ion etching , chemistry , nanotechnology , composite material , metallurgy , biochemistry , layer (electronics) , engineering
Square pore cross‐sections and pore arrays of high porosity can be produced by subsequent alkaline etching of macroporous silicon membranes. The dependence of pore geometry on etching time, solution temperature and composition is investigated. The produced membranes offer new roads to investigate the formation of pyramidal hillocks during alkaline etching; an effect which is known for half a century, but not understood in detail. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)