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Local control of SiC polytypes
Author(s) -
Pezoldt J.,
Morales F. M.,
Kalnin A. A.
Publication year - 2007
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200674123
Subject(s) - sublimation (psychology) , epitaxy , annealing (glass) , materials science , crystallography , ion , optoelectronics , nanotechnology , chemistry , composite material , psychology , organic chemistry , layer (electronics) , psychotherapist
In the case of SiC different methods for the formation of laterally and vertically stacked desired polytype inclusions are presented. The methods are based on a combination of ion implantation and annealing combined with epitaxial growth by sublimation technique. Nanoheteropolytype structures were formed using CVD. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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