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GaN MQW microdisks pivoted on Si substrate
Author(s) -
Choi H. W.,
Yang B. L.,
Lai P. T.,
Chen P.,
Zhang X. H.,
Teng J. H.,
Chua S. J.
Publication year - 2007
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200673576
Subject(s) - materials science , optoelectronics , fabrication , photoluminescence , photolithography , whispering gallery , pillar , whispering gallery wave , substrate (aquarium) , isotropy , dry etching , etching (microfabrication) , optics , nanotechnology , resonator , layer (electronics) , physics , medicine , oceanography , alternative medicine , structural engineering , pathology , geology , engineering
The fabrication and characterization of GaN MQW microdisks pivoted on Si is reported in this paper. The GaN microdisks were patterned by photolithography and dry‐etched. This is followed by an isotropic wet‐etch process to remove the Si underneath the GaN microdisks, exposing the bottom GaN surface. A Si pillar is left behind to support the microdisk structure. The smooth GaN/air interface provides a reflectivity of ∼20%. Modal features are observed in the photoluminescence spectrum with a mode spacing of ∼1.1 nm. From theoretical predictions whispering gallery (WG) modes are likely to dominate in these microdisks structures. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)