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FEM modelling of surface acoustic wave in diamond layered structure
Author(s) -
Le Brizoual L.,
Sarry F.,
Moreira F.,
Elmazria O.
Publication year - 2006
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200671106
Subject(s) - diamond , finite element method , penetration (warfare) , piezoelectricity , admittance , materials science , surface acoustic wave , acoustics , surface wave , penetration depth , composite material , optics , structural engineering , physics , engineering , electrical engineering , electrical impedance , operations research
This paper describes a general finite element method (FEM) for the AC steady state analysis of two‐dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves corresponding to ZnO layer of 1 µm thick and spatial periodicity of 4 µm. The structure admittance response shows six peaks corresponding to the mode 0, 1 and 2. The penetration depth in diamond is around 8 µm except for the mode 2 where it reaches 12 µm. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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