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Towards the application of nanocrystalline metals in MEMS
Author(s) -
Baghbanan Mohammadreza,
Erb Uwe,
Palumbo Gino
Publication year - 2006
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200566155
Subject(s) - nanocrystalline material , crystallite , materials science , microsystem , modulus , nanoindentation , microelectromechanical systems , indentation hardness , elastic modulus , composite material , young's modulus , metallurgy , nanotechnology , microstructure
Abstract A comparison is presented of the cross‐sectional mechanical properties (i.e. hardness and Young's modulus) for electrodeposited microsystem components with conventional polycrystalline and nanocrystalline structures. It is shown that nanocrystalline electrodeposits exhibit considerabily improved cross‐sectional properties both in terms of uniformity (hardness and Young's modulus) and overall hardness level. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)