Premium
Studies of gas sensing, electrical and chemical properties of n‐InP epitaxial surfaces
Author(s) -
Wierzbowska K.,
Pauly A.,
Adamowicz B.,
Bideux L.
Publication year - 2006
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200566030
Subject(s) - epitaxy , layer (electronics) , nitrogen dioxide , optoelectronics , electrical resistance and conductance , nitrogen gas , materials science , range (aeronautics) , chemistry , analytical chemistry (journal) , nanotechnology , environmental chemistry , composite material , organic chemistry
The gas sensing and electrical properties of a novel toxic gas sensor structure based on n‐InP epitaxial layer were studied. The gas sensing properties were investigated under extremely low concentration (in the ppb range) of toxic gas, nitrogen dioxide, in dry pure air. The sensor responses in terms of the resistance changes Δ R , towards NO 2 of the structures with different active InP layer thickness were compared. The influence of the surface states at InP surface on the initial resistance of the sensor structure was shown from numerical simulations. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)