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Crack free monolithic nitride vertical‐cavity surface‐emitting laser structures and pillar microcavities
Author(s) -
Lohmeyer Henning,
Sebald Kathrin,
Kruse Carsten,
Kröger Roland,
Gutowski Jürgen,
Hommel Detlef,
Wiersig Jan,
Jahnke Frank
Publication year - 2006
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.200565426
Subject(s) - materials science , pillar , fabrication , optoelectronics , transfer matrix method (optics) , focused ion beam , nitride , etching (microfabrication) , longitudinal mode , photoluminescence , laser , optics , vertical cavity surface emitting laser , superlattice , ion , layer (electronics) , nanotechnology , chemistry , wavelength , medicine , alternative medicine , physics , structural engineering , organic chemistry , pathology , engineering
Abstract We report on the successful fabrication and optical investigation of monolithicly grown GaN based vertical‐cavity surface‐emitting laser structures featuring quality factors of 250. Short‐period AlN/InGaN superlattices are used for the low‐index layers of the distributed Bragg reflectors. Pillar microcavities are realized by focused‐ion‐beam etching. Micro‐photoluminescence measurements reveal the longitudinal and transversal mode spectra of the cavities in good agreement with theoretical calculations based on a vectorial transfer matrix method. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)